Substance profile
Trichlorosilane
Trichlorosilane is a colorless liquid with an acrid odor.
01 · Identification
What Trichlorosilane is
Trichlorosilane is a colorless liquid with an acrid odor. It boils at 31.8 °C, melts at -126 °C.
Under the GHS it carries the signal word Danger. It is classed as corrosives.
02 · GHS classification
Hazards and label elements
Harmonised classification under CLP Annex VI. This is the legally binding classification in the EU; other jurisdictions may differ.
| Code | Hazard statement |
|---|---|
| H224 | Extremely flammable liquid and vapour. |
| H260 | In contact with water releases flammable gases which may ignite spontaneously. |
| H331 | Toxic if inhaled. |
| H302 | Harmful if swallowed. |
| H314 | Causes severe skin burns and eye damage. |
| H318 | Causes serious eye damage. |
Supplemental EU statements: EUH014, EUH029, EUH071
Precautionary statements: P210, P233, P241, P242, P260, P270, P271, P280, P301, P304, P305, P310, P312, P330, P331, P338, P403
03 · Physical and chemical properties
Trichlorosilane properties
Every value is shown with the conditions it was measured under and the source it came from. Where sources disagree, all values are listed rather than one being picked — the difference is usually a different form of the substance, not an error.
| Property | Value | Conditions | Source |
|---|---|---|---|
| Boiling point | 31.8 °C (89.2 °F) | at 760 mmHg | HSDB |
| 32.22 °C (90 °F) | at 760 mmHg | CAMEO | |
| 31.8 °C (89.2 °F) | ICSC | ||
| Melting point | -126.5 °C (-195.7 °F) | HSDB | |
| -127.22 °C (-197 °F) | CAMEO | ||
| Density | 1.34 g/cm³ | ICSC | |
| 1.3417 g/cm³ | at 20 °C | HSDB | |
| 1.344 g/cm³ | at 20 °C | CAMEO | |
| Solubility | Sol in benzene, carbon disulfide, chloroform, carbon tetrachloride | HSDB | |
| Sol in ether, heptane, perchloroethylene | HSDB | ||
| Solubility in water: reaction | ICSC | ||
| Vapor pressure | 493.541 mmHg | at 20 °C | ICSC |
| 750 mmHg | at 31.6 °C | DOE PAC | |
| 594 mmHg | Haz-Map | ||
| Flash point | -13.89 °C (7 °F) | HSDB | |
| -27 °C (-16.6 °F) | ICSC | ||
| -50 °C (-58 °F) | above this value | CAMEO | |
| Autoignition temperature | 182.22 °C (360 °F) | HSDB | |
| 104.44 °C (220 °F) | CAMEO | ||
| 185 °C (365 °F) | ICSC | ||
| Lower explosive limit (LEL) | 1.2 % by volume | HSDB | |
| Upper explosive limit (UEL) | 90.5 % by volume | HSDB | |
| Vapor density | 4.67 (air = 1) | HSDB | |
| 4.7 (air = 1) | ICSC | ||
| Corrosivity | Corrodes metal after reacting with moisture to form hydrochloric acid | HSDB |
Values compiled from PubChem Laboratory Chemical Safety Summary. Temperatures converted to Fahrenheit for reference.
04 · Handling and storage
Storing and handling Trichlorosilane
Storage conditions
Fireproof. Separated from food and feedstuffs and incompatible materials ... Cool. Dry. Well closed. Ventilation along the floor.
Source: Hazardous Substances Data Bank (HSDB)
Incompatible materials
... Water reactive. Hydrochloric acid is released ... Reacts violently with water and aqueous soln, alcohols, organic acids, peroxides, amines, and oxidizing materials ...
Source: Hazardous Substances Data Bank (HSDB)
Reactivity
TRICHLOROSILANE reacts with alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases [Handling Chemicals Safely 1980. p. 924].
Source: CAMEO Chemicals
Planning storage for a mix of chemicals? Check Trichlorosilane in the storage compatibility matrix →